META Conference, META'10

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New surface plasmon polariton photodetectors based on diffraction gratings with anticorrelated relief
Sergiy Mamykin

Last modified: 2009-11-07


Surface plasmon polariton photodetectors based on the gratings with antocorrelated relief have been proposed for the first time. Spectral dependence of light reflectance as well as photocurrent shows peculiarities connected with excitation of surface plasmon polaritons. The technology of grating formation allows to avoid the etching of semiconductor substrate. This simplified the manufacturing process significantly and makes it more compatible with microelectronic technological processing.